[IEEE 2010 21st Annual IEEE/SEMI Advanced Semiconductor Manufacturing Conference (ASMC) - San Francisco, CA, USA (2010.07.11-2010.07.13)] 2010 IEEE/SEMI Advanced Semiconductor Manufacturing Conference (ASMC) - A holistic scanner matching solution for productivity enhancement in a Giga fab

• 作者Shih, Victor; Peng, R. C.; Chien, T. C.; Liu, H. H.; Chen, Y. C.; Wang, S.; Lee, H. J.; Lin, John; Wang, W.; Yang, W. T.; Huang, J.; Ke, C. M.; Gao, T. S.; Bhattacharyya, K.; Schaar, M.; Wright, N.; Shahrjerdy, M.; Wang, V.; Lin, S.; Wu, J.; Peng, S.; Lin, K.; Lin, W.; Un, M.; Fuchs, A.; Adam, O.; Wang, C.; Mast, K.; Shao, W.; Xie, X.; Cao, Y.; Hsieh, S.; Goossens, R.
• 文件大小358.07KB
• 发表时间2010
• DOI10.1109/asmc.2010.5551449
• 页码184-188