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Evaluation of emission uniformity of nanocrystalline silicon planar cathodes

Shimawaki, Hidetaka; Murakami, Katsuhisa; Neo, Yoichiro; Mimura, Hidenori; Wakaya, Fujio; Takai, Mikio

期刊名称Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
作者Shimawaki, Hidetaka; Murakami, Katsuhisa; Neo, Yoichiro; Mimura, Hidenori; Wakaya, Fujio; Takai, Mikio
卷第28卷
期第2期
印刷ISSN1071-1023
文件大小783.79KB
发表时间2010
DOI10.1116/1.3271165