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Impact of surface topography and laser pulse duration for laser ablation of solar cell front side passivating SiN[sub x] layers

Impact of surface topography and laser pulse duration for laser ablation of solar cell front side passivating SiN[sub x] layers

Hermann, Sonja; Dezhdar, Tara; Harder, Nils-Peter; Brendel, Rolf; Seibt, Michael; Stroj, Sandra
  • 期刊名称Journal of Applied Physics
  • 作者Hermann, Sonja; Dezhdar, Tara; Harder, Nils-Peter; Brendel, Rolf; Seibt, Michael; Stroj, Sandra
  • 卷第108卷
  • 期第11期
  • 印刷ISSN0021-8979
  • 文件大小998.04KB
  • 发表时间2010
  • DOI10.1063/1.3493204
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