[IEEE 2010 IEEE 37th International Conference on Plasma Sciences (ICOPS) - Norfolk, VA, USA (2010.06.20-2010.06.24)] 2010 Abstracts IEEE International Conference on Plasma Science - Fluorination of polypropylene by remote inductively coupled plasmas sustained in Ar/F2 and Ar/NF3 gas mixtures
- 作者Song, Sang-He; Yang, Yang; Strobel, Mark; Kirk, Seth; Kushner, Mark J.
- 文件大小169.03KB
- 发表时间2010
- DOI10.1109/plasma.2010.5534152
- 页码1-1
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