[IEEE High Density Packaging (ICEPT-HDP) - Xi'an, China (2010.08.16-2010.08.19)] 2010 11th International Conference on Electronic Packaging Technology & High Density Packaging - Optimization of the Microwave Induced Plasma system for failure analysis in integrated circuit packaging
Tang, J.; Schelen, J.B.J.; Beenakker, C.I.M.
- 作者Tang, J.; Schelen, J.B.J.; Beenakker, C.I.M.
- 文件大小865.55KB
- 发表时间2010
- DOI10.1109/icept.2010.5582713
- 页码1034-1038