[IEEE 2010 IEEE 3rd International Nanoelectronics Conference (INEC) - Hong Kong, China (2010.01.3-2010.01.8)] 2010 3rd International Nanoelectronics Conference (INEC) - The model of nano-scale copper particles removal from silicon surface in high pressure CO2 +H2 O and CO2 +H2 O+IPA cleaning solutions
- 作者Xin Tan, ; Jiajue Chai, ; Zhang, Xiaogang; Jiawei Chen,
- 文件大小131.81KB
- 发表时间2010
- DOI10.1109/inec.2010.5424770
- 页码592-593
[IEEE 2011 IEEE International Conference on System Engineering and Technology (ICSET) - Shah Alam, Malaysia (2011.06.27-2011.06.28)] 2011 IEEE International Conference on System Engineering and Technology - Reviewers2011
[IEEE 2011 IEEE International Conference on Control System, Computing and Engineering (ICCSCE) - Penang, Malaysia (2011.11.25-2011.11.27)] 2011 IEEE International Conference on Control System, Computing and Engineering - Cover2011
[IEEE 2011 IEEE International Conference on System Engineering and Technology (ICSET) - Shah Alam, Malaysia (2011.06.27-2011.06.28)] 2011 IEEE International Conference on System Engineering and Technology - Front cover2011
[IEEE 2011 IEEE International Conference on Control System, Computing and Engineering (ICCSCE) - Penang, Malaysia (2011.11.25-2011.11.27)] 2011 IEEE International Conference on Control System, Computing and Engineering - Reviewers2011
[IEEE 2011 IEEE International Conference on Control System, Computing and Engineering (ICCSCE) - Penang, Malaysia (2011.11.25-2011.11.27)] 2011 IEEE International Conference on Control System, Computing and Engineering - Copyright2011
[IEEE 2011 IEEE International Conference on System Engineering and Technology (ICSET) - Shah Alam, Malaysia (2011.06.27-2011.06.28)] 2011 IEEE International Conference on System Engineering and Technology - Organizing committee2011
[IEEE 2011 IEEE International Conference on System Engineering and Technology (ICSET) - Shah Alam, Malaysia (2011.06.27-2011.06.28)] 2011 IEEE International Conference on System Engineering and Technology - Copyright page2011
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