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Dependence of film surface roughness and slope on surface migration and lattice size in thin film deposition processes

Dependence of film surface roughness and slope on surface migration and lattice size in thin film deposition processes

Jianqiao Huang; Gangshi Hu; Gerassimos Orkoulas; Panagiotis D. Christofides
  • 作者Jianqiao Huang; Gangshi Hu; Gerassimos Orkoulas; Panagiotis D. Christofides
  • 卷第65卷
  • 期第23期
  • 印刷ISSN0009-2509
  • 文件大小673.48KB
  • 发表时间2010
  • DOI10.1016/j.ces.2010.08.035
  • 页码6101-6111
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