Effect of fluorine contamination on barrier metal oxidation

S. Ozaki; Y. Nakata; Y. Kobayashi; T. Nakamura; Y. Iba; S. Fukuyama; H. Watatani; Y. Ohkura

作者S. Ozaki; Y. Nakata; Y. Kobayashi; T. Nakamura; Y. Iba; S. Fukuyama; H. Watatani; Y. Ohkura
卷第87卷
期第3期
印刷ISSN0167-9317
文件大小461.33KB
发表时间2010
DOI10.1016/j.mee.2009.06.011
页码370-372

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