Effect of a silicon nitride buffer layer on the electrical properties of tantalum pentoxide films
- 作者B.Y. Wang; Hao Wang; C. Ye; Y. Wang; Y. Ye; W.F. Wang
- 卷第87卷
- 期第4期
- 印刷ISSN0167-9317
- 文件大小495.25KB
- 发表时间2010
- DOI10.1016/j.mee.2009.08.020
- 页码597-600
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