Electron beam lithography on cylindrical roller
- 作者Shih Chun Tseng; Wen Yang Peng; Yi Fan Hsieh; Ping Jen Lee; Wen Lang Lai
- 卷第87卷
- 印刷ISSN0167-9317
- 文件大小732.25KB
- 发表时间2010
- DOI10.1016/j.mee.2009.11.156
- 页码943-946
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