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Investigation on the Structure and Properties of TiAlN Coatings Deposited by DC Reactive Magnetron Sputtering

Investigation on the Structure and Properties of TiAlN Coatings Deposited by DC Reactive Magnetron Sputtering

Wang, Xuan; Zhang, Kui; Yue, Guang Hui; Peng, Dong Liang; Qi, Zheng Bing; Wang, Zhou Cheng
  • 期刊名称Advanced Materials Research
  • 作者Wang, Xuan; Zhang, Kui; Yue, Guang Hui; Peng, Dong Liang; Qi, Zheng Bing; Wang, Zhou Cheng
  • 电子ISSN1662-8985
  • 文件大小793.75KB
  • 发表时间2010-10
  • DOI10.4028/www.scientific.net/AMR.154-155.1639
  • 页码1639-1642
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