The Research of Micromachined Airflow Tilt Sensor
- 期刊名称Advanced Materials Research
- 作者Piao, Lin Hua; Li, Yan Jie; Li, Bai Hua; Ji, Ming Ming; Zhang, Xue Yan
- 电子ISSN1662-8985
- 文件大小294.68KB
- 发表时间2010-5
- DOI10.4028/www.scientific.net/AMR.108-111.682
- 页码682-685
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