Concentrated Chloride-Based Epitaxial Growth of 4H-SiC
- 期刊名称Materials Science Forum
- 作者Henry, Anne; Leone, Stefano; Andersson, S.; Kordina, Olle; Janzén, Erik
- 电子ISSN1662-9752
- 文件大小411.47KB
- 发表时间2010-4
- DOI10.4028/www.scientific.net/MSF.645-648.95
- 页码95-98
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