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Electrical Properties of Pulsed Laser Deposited Y[sub 2]O[sub 3] Gate Oxide on 4H–SiC

Quah, Hock Jin; Lim, Way Foong; Wimbush, Stuart C.; Lockman, Zainovia; Cheong, Kuan Yew

期刊名称Electrochemical and Solid-State Letters
作者Quah, Hock Jin; Lim, Way Foong; Wimbush, Stuart C.; Lockman, Zainovia; Cheong, Kuan Yew
卷第13卷
期第11期
印刷ISSN1099-0062
文件大小350.38KB
发表时间2010
DOI10.1149/1.3481926