Machine learning for inverse lithography: using stochastic gradient descent for robust photomask synthesis
- 期刊名称Journal of Optics
- 作者Jia, Ningning; Lam, Edmund Y
- 卷第12卷
- 期第4期
- 印刷ISSN2040-8978
- 电子ISSN2040-8986
- 文件大小236.16KB
- 发表时间2010-04-01
- DOI10.1088/2040-8978/12/4/045601
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