Study on the Effect of Base Pressure on Magnetron Sputtering Discharge Plasma by Optical Emission Spectroscopy
Yugeswaran, S; Suresh, K; Selvarajan, V
- 期刊名称Plasma Science and Technology
- 作者Yugeswaran, S; Suresh, K; Selvarajan, V
- 卷第12卷
- 期第1期
- 印刷ISSN1009-0630
- 文件大小1975.34KB
- 发表时间2010-02
- DOI10.1088/1009-0630/12/1/08
- 页码35-40