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Study on the Effect of Base Pressure on Magnetron Sputtering Discharge Plasma by Optical Emission Spectroscopy

Study on the Effect of Base Pressure on Magnetron Sputtering Discharge Plasma by Optical Emission Spectroscopy

Yugeswaran, S; Suresh, K; Selvarajan, V
  • 期刊名称Plasma Science and Technology
  • 作者Yugeswaran, S; Suresh, K; Selvarajan, V
  • 卷第12卷
  • 期第1期
  • 印刷ISSN1009-0630
  • 文件大小1975.34KB
  • 发表时间2010-02
  • DOI10.1088/1009-0630/12/1/08
  • 页码35-40
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