Dummy fill effect on CMP planarity
Junxiong, Zhou; Lan, Chen; Wenbiao, Ruan; Zhigang, Li; Weixiang, Shen; Tianchun, Ye
- 期刊名称Journal of Semiconductors
- 作者Junxiong, Zhou; Lan, Chen; Wenbiao, Ruan; Zhigang, Li; Weixiang, Shen; Tianchun, Ye
- 卷第31卷
- 期第10期
- 印刷ISSN1674-4926
- 文件大小1207.58KB
- 发表时间2010-10
- DOI10.1088/1674-4926/31/10/106003