Study on MEMS Microgripper Integrated Vacuum Tool
- 期刊名称Applied Mechanics and Materials
- 作者Chen, Tao; Chen, Li Guo; Pan, Ming Qiang; Sun, Li Ning
- 卷第43卷
- 电子ISSN1662-7482
- 文件大小473.05KB
- 发表时间2010-12
- DOI10.4028/www.scientific.net/AMM.43.471
- 页码471-475
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