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High-Resolution Dimensional Metrology for Industrial Applications

Schuldt, Thilo; Gohlke, Martin; Weise, Dennis; Peters, Achim; Johann, Ulrich; Braxmaier, Claus

期刊名称Key Engineering Materials
作者Schuldt, Thilo; Gohlke, Martin; Weise, Dennis; Peters, Achim; Johann, Ulrich; Braxmaier, Claus
卷第437卷
电子ISSN1662-9795
文件大小2526.76KB
发表时间2010-5
DOI10.4028/www.scientific.net/kem.437.113
页码113-117