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Integration of SWNT film into MEMS for a micro-thermoelectric device

Integration of SWNT film into MEMS for a micro-thermoelectric device

V. T. Dau; D. V. Dao; T. Yamada; B. T. Tung; K. Hata; S. Sugiyama

作者V. T. Dau; D. V. Dao; T. Yamada; B. T. Tung; K. Hata; S. Sugiyama
文件大小654.35KB
发表时间2010
DOI10.1088/0964-1726/19/7/075003

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