Measurement of Strain in Freestanding Si/SixNyMembrane by Convergent Beam Electron Diffraction and Finite Element Method
- 作者H. Gao; K. Ikeda; S. Hata; H. Nakashima; D. Wang; H. Nakashima
- 文件大小444.57KB
- 发表时间2010
- DOI10.1143/JJAP.49.090208
海量图书期刊资源，随时随地畅享阅读乐趣