[ASME ASME 2010 International Mechanical Engineering Congress and Exposition - Vancouver, British Columbia, Canada (November 12–18, 2010)] Volume 4: Electronics and Photonics - Micro Texture Dependence of Both the Mechanical and Electrical Properties of Electroplated Copper Thin Films Used for Interconnection
Murata, Naokazu; Saito, Naoki; Tamakawa, Kinji; Suzuki, Ken; Miura, Hideo
- 作者Murata, Naokazu; Saito, Naoki; Tamakawa, Kinji; Suzuki, Ken; Miura, Hideo
- 文件大小2711.40KB
- 发表时间2010
- DOI10.1115/IMECE2010-37279
- 页码455-461