Electron holography for analysis of deep submicron devices: Present status and challenges
- 期刊名称Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena
- 作者Ikarashi, Nobuyuki; Toda, Akio; Uejima, Kazuya; Yako, Koichi; Yamamoto, Toyoji; Hane, Masami; Sato, Hiroshi
- 卷第28卷
- 期第1期
- 印刷ISSN2166-2746
- 电子ISSN2166-2754
- 文件大小680.32KB
- 发表时间2010-01
- DOI10.1116/1.3207964
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