Submicrometer tomographic resolution examined using a micro-fabricated test object
Ryuta Mizutani; Akihisa Takeuchi; R. Yoshiyuki Osamura; Susumu Takekoshi; Kentaro Uesugi; Yoshio Suzuki
- 作者Ryuta Mizutani; Akihisa Takeuchi; R. Yoshiyuki Osamura; Susumu Takekoshi; Kentaro Uesugi; Yoshio Suzuki
- 卷第41卷
- 期第1期
- 印刷ISSN0968-4328
- 文件大小454.21KB
- 发表时间2010
- DOI10.1016/j.micron.2009.09.001
- 页码90-95