Methodology to determine the impact of linewidth variation on chip scale copper/low-k backend dielectric breakdown

• 作者Muhammad Bashir; Linda Milor; Dae Hyun Kim; Sung Kyu Lim
• 卷第50卷
• 印刷ISSN0026-2714
• 文件大小603.31KB
• 发表时间2010
• DOI10.1016/j.microrel.2010.07.091
• 页码1341-1346