Characterization of sputtered ZnO films under different sputter-etching time of substrate
- 作者Cui-ping Li; Bao-he Yang; Li-rong Qian; Sheng Xu; Wei Dai; Ming-ji Li; Xiao-wei Li; Cheng-yao Gao
- 卷第7卷
- 期第6期
- 印刷ISSN1673-1905
- 电子ISSN1993-5013
- 文件大小408.84KB
- 发表时间2011-11
- DOI10.1007/s11801-011-1066-z
- 页码431-436