Advanced Method for Defect Characterization Using Fail Bit Analysis and Critical Area Simulation

Matsumoto, C.; Hamamura, Y.; Chida, T.; Tsunoda, Y.; Go, N.; Uozaki, H.; Miyazaki, I.; Kamohara, S.; Kaneko, Y.; Kanamitsu, K.

作者Matsumoto, C.; Hamamura, Y.; Chida, T.; Tsunoda, Y.; Go, N.; Uozaki, H.; Miyazaki, I.; Kamohara, S.; Kaneko, Y.; Kanamitsu, K.
卷第24卷
期第2期
印刷ISSN0894-6507
电子ISSN1558-2345
文件大小535.81KB
发表时间2011
DOI10.1109/tsm.2011.2106168
页码151-157

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