Fabrication and characterization of silicon antireflection structures for infrared rays using a femtosecond laser
Sakakura, Masaaki; Shimotsuma, Yasuhiko; Miura, Kiyotaka; Hirao, Kazuyuki; Imamoto, Hiroshi; Kanehira, Shingo; Wang, Xi; Kametani, Keisuke
- 期刊名称ol/36/7/ol-36-7-1176.pdf
- 作者Sakakura, Masaaki; Shimotsuma, Yasuhiko; Miura, Kiyotaka; Hirao, Kazuyuki; Imamoto, Hiroshi; Kanehira, Shingo; Wang, Xi; Kametani, Keisuke
- 卷第36卷
- 期第7期
- 印刷ISSN0146-9592
- 电子ISSN1539-4794
- 文件大小428.39KB
- 发表时间2011
- DOI10.1364/OL.36.001176