Effect of substrate bias voltage on the structure, electric and dielectric properties of TiO2 thin films by DC magnetron sputtering

• 作者M. Chandra Sekhar; P. Kondaiah; S.V. Jagadeesh Chandra; G. Mohan Rao; S. Uthanna
• 卷第258卷
• 期第5期
• 印刷ISSN0169-4332
• 文件大小1437.60KB
• 发表时间2011
• DOI10.1016/j.apsusc.2011.10.047