Fabrication Processes for Capacity-Equalized Mold with Fine Patterns
- 期刊名称Japanese Journal of Applied Physics
- 作者Suzuki, Kenta; Youn, Sung-Won; Wang, Qing; Hiroshima, Hiroshi; Nishioka, Yasushiro
- 卷第50卷
- 期第6期
- 印刷ISSN0021-4922
- 电子ISSN1347-4065
- 文件大小1004.41KB
- 发表时间2011-6-20
- DOI10.1143/jjap.50.06gk04
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