Porous Ceramic Packaging for a MEMS Humidity Sensor Requiring Environmental Access

Dean, R.N.; Surgnier, S.; Pack, J.; Sanders, N.; Reiner, P.; Long, C.W.; Fenner, R.; Fenner, W.P.

作者Dean, R.N.; Surgnier, S.; Pack, J.; Sanders, N.; Reiner, P.; Long, C.W.; Fenner, R.; Fenner, W.P.
卷第1卷
期第3期
文件大小905.87KB
发表时间2011
DOI10.1109/tcpmt.2010.2101230
页码428-435

发现好书期刊，享受阅读乐趣