Simultaneous Capacitive and Electrothermal Position Sensing in a Micromachined Nanopositioner
- 期刊名称IEEE Electron Device Letters
- 作者Zhu, Y.; Moheimani, S. O. R.; Yuce, M. R.
- 卷第32卷
- 期第8期
- 印刷ISSN0741-3106
- 电子ISSN1558-0563
- 文件大小329.93KB
- 发表时间2011-08
- DOI10.1109/LED.2011.2155027
- 页码1146-1148
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