Accurate calibration for the quantification of the Al content in AlGaN epitaxial layers by energy-dispersive X-ray spectroscopy in a Transmission Electron Microscope
- 期刊名称Journal of Physics: Conference Series
- 作者Amari, H; Lari, L; Zhang, H Y; Geelhaar, L; Chèze, C; Kappers, M J; McAleese, C; Humphreys, C J; Walther, T
- 卷第326卷
- 电子ISSN1742-6596
- 文件大小5344.14KB
- 发表时间2011-11-09
- DOI10.1088/1742-6596/326/1/012028
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