[IEEE 2011 Materials for Advanced Metallization (MAM) - Dresden, Germany (2011.05.8-2011.05.12)] 2011 IEEE International Interconnect Technology Conference - Process transfers provide opportunities for more reliable products
- 作者Kuper, Fred; Wessels, Piet; Ooms, Eric; van Herk, Joost; Rijnsburger, Marcel; van Driel, Willem; Plagge, Jos
- 文件大小271.04KB
- 发表时间2011
- DOI10.1109/iitc.2011.5940265
- 页码1-3
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