Power Output Force Generation by a MEMS Phase Change Actuator
- 期刊名称Journal of Microelectromechanical Systems
- 作者Weiss, Leland W.; Richards, Cill D.; Richards, Robert F.
- 卷第20卷
- 期第6期
- 印刷ISSN1057-7157
- 文件大小739.99KB
- 发表时间2011-12
- DOI10.1109/JMEMS.2011.2167660
- 页码1287-1297
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