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[IEEE Multi-Physics Simulation and Experiments in Microelectronics and Microsystems (EuroSimE) - Linz, Austria (2011.04.18-2011.04.20)] 2011 12th Intl. Conf. on Thermal, Mechanical & Multi-Physics Simulation and Experiments in Microelectronics and Microsystems - Computer-aided multiscale model derivation for MEMS arrays

[IEEE Multi-Physics Simulation and Experiments in Microelectronics and Microsystems (EuroSimE) - Linz, Austria (2011.04.18-2011.04.20)] 2011 12th Intl. Conf. on Thermal, Mechanical & Multi-Physics Simulation and Experiments in Microelectronics and Microsystems - Computer-aided multiscale model derivation for MEMS arrays

Yang, B.; Belkhir, W.; Dhara, R. N.; Lenczner, M.; Giorgetti, A.
  • 作者Yang, B.; Belkhir, W.; Dhara, R. N.; Lenczner, M.; Giorgetti, A.
  • 文件大小1467.50KB
  • 发表时间2011
  • DOI10.1109/esime.2011.5765784
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