Gallium nitride nanowire electromechanical resonators with piezoresistive readout
- 期刊名称Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
- 作者Gray, Jason M.; Rogers, Charles T.; Bertness, Kris A.; Sanford, Norman A.
- 卷第29卷
- 期第5期
- 印刷ISSN1071-1023
- 文件大小877.95KB
- 发表时间2011
- DOI10.1116/1.3622326
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