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Characterization of NbAlO dielectric film deposited on InP

Characterization of NbAlO dielectric film deposited on InP

He, Dawei; Cheng, Xinhong; Xu, Dawei; Wang, Zhongjian; Yu, Yuehui; Sun, Qingqing; Zhang, David Wei
  • 期刊名称Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
  • 作者He, Dawei; Cheng, Xinhong; Xu, Dawei; Wang, Zhongjian; Yu, Yuehui; Sun, Qingqing; Zhang, David Wei
  • 卷第29卷
  • 期第1期
  • 印刷ISSN1071-1023
  • 文件大小544.70KB
  • 发表时间2011
  • DOI10.1116/1.3532387
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