[IEEE 2011 IEEE International Ultrasonics Symposium (IUS) - Orlando, FL, USA (2011.10.18-2011.10.21)] 2011 IEEE International Ultrasonics Symposium - SAW resonator-based wafer processing control
- 作者Dufilie, Pierre; Yoder, Merle; Jacobs, Jim
- 文件大小968.82KB
- 发表时间2011
- DOI10.1109/ultsym.2011.0137
- 页码568-572
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