Influence of annular magnet on discharge characteristics in enhanced glow discharge plasma immersion ion implantation

Li, Liu He; Wang, Zhuo; Lu, Qiu Yuan; Pang, En Jing; Dun, Dan Dan; He, Fu Shun; Li, Fen; Fu, Ricky K. Y.; Chu, Paul K.

期刊名称Applied Physics Letters
作者Li, Liu He; Wang, Zhuo; Lu, Qiu Yuan; Pang, En Jing; Dun, Dan Dan; He, Fu Shun; Li, Fen; Fu, Ricky K. Y.; Chu, Paul K.
卷第98卷
期第2期
印刷ISSN0003-6951
文件大小1196.66KB
发表时间2011
DOI10.1063/1.3537962

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