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[IEEE IECON 2011 - 37th Annual Conference of IEEE Industrial Electronics - Melbourne, Vic, Australia (2011.11.7-2011.11.10)] IECON 2011 - 37th Annual Conference of the IEEE Industrial Electronics Society - Force controller design based on PQ method for dual-stage actuators in polishing machines

[IEEE IECON 2011 - 37th Annual Conference of IEEE Industrial Electronics - Melbourne, Vic, Australia (2011.11.7-2011.11.10)] IECON 2011 - 37th Annual Conference of the IEEE Industrial Electronics Society - Force controller design based on PQ method for dual-stage actuators in polishing machines

Seki, Kenta; Shinohara, Yusaku; Iwasaki, Makoto; Chinda, Hiroshi; Takahashi, Masaki
  • 作者Seki, Kenta; Shinohara, Yusaku; Iwasaki, Makoto; Chinda, Hiroshi; Takahashi, Masaki
  • 文件大小442.66KB
  • 发表时间2011
  • DOI10.1109/iecon.2011.6119856
  • 页码3388-3393
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