[IEEE 2011 Joint conference of the IEEE International Frequency Control and the European Frequency and Time Forum (FCS) - San Francisco, CA, USA (2011.05.2-2011.05.5)] 2011 Joint Conference of the IEEE International Frequency Control and the European Frequency and Time Forum (FCS) Proceedings - Collective fabrication of 20 MHz resonators by deep Reactive Ion Etching on 3'' quartz wafers
- 作者Boy, J. J.; Tavernier, H.; Vacheret, X.; Laroche, T.; Clairet, A.
- 文件大小1278.34KB
- 发表时间2011
- DOI10.1109/fcs.2011.5977812
- 页码1-5
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