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Microscopic Structure of Directly Bonded Silicon Substrates

Microscopic Structure of Directly Bonded Silicon Substrates

Kato, Tetsuji; Ohara, Yuji; Ueda, Takaya; Kikkawa, Jun; Nakamura, Yoshiaki; Sakai, Akira; Nakatsuka, Osamu; Ogawa, Masaki; Zaima, Shigeaki; Toyoda, Eiji; Isogai, Hiromichi; Senda, Takeshi; Izunome, Kouji; Tajiri, Hiroo; Sakata, Osamu; Kimura, Shigeru
  • 期刊名称Key Engineering Materials
  • 作者Kato, Tetsuji; Ohara, Yuji; Ueda, Takaya; Kikkawa, Jun; Nakamura, Yoshiaki; Sakai, Akira; Nakatsuka, Osamu; Ogawa, Masaki; Zaima, Shigeaki; Toyoda, Eiji; Isogai, Hiromichi; Senda, Takeshi; Izunome, Kouji; Tajiri, Hiroo; Sakata, Osamu; Kimura, Shigeru
  • 卷第470卷
  • 电子ISSN1662-9795
  • 文件大小1256.45KB
  • 发表时间2011-2
  • DOI10.4028/www.scientific.net/KEM.470.164
  • 页码164-170
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