Low Cost Fabrication of Micro Glass Cavities For MEMS Wafer Level and Hermetic Packaging

Shang, Jin Tang; Liu, Jun Wen; Zhang, Di; Chen, Bo Yin; Xu, Chao; Luo, Xin Hu; Yu, Hui; Liu, Jing Dong; Huang, Qing An; Tang, Jie Ying; Qin, Ming

期刊名称Key Engineering Materials
作者Shang, Jin Tang; Liu, Jun Wen; Zhang, Di; Chen, Bo Yin; Xu, Chao; Luo, Xin Hu; Yu, Hui; Liu, Jing Dong; Huang, Qing An; Tang, Jie Ying; Qin, Ming
卷第483卷
电子ISSN1662-9795
文件大小1475.14KB
发表时间2011-6
DOI10.4028/www.scientific.net/KEM.483.23
页码23-33

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