Microwave MEMS devices designed for process robustness and operational reliability
- 期刊名称International Journal of Microwave and Wireless Technologies
- 作者Sterner, Mikael; Somjit, Nutapong; Shah, Umer; Dudorov, Sergey; Chicherin, Dmitry; Räisänen, Antti; Oberhammer, Joachim
- 卷第3卷
- 期第5期
- 印刷ISSN1759-0787
- 电子ISSN1759-0795
- 文件大小1379.51KB
- 发表时间2011-10
- DOI10.1017/s1759078711000845
- 页码547-563
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