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Preparation of chromium oxynitride and chromium nitride films by DC reactive magnetron sputtering and their material properties

Preparation of chromium oxynitride and chromium nitride films by DC reactive magnetron sputtering and their material properties

Subramanian, B; Jayachandran, M
  • 期刊名称Corrosion Engineering, Science and Technology
  • 作者Subramanian, B; Jayachandran, M
  • 卷第46卷
  • 期第4期
  • 印刷ISSN1478-422X
  • 电子ISSN1743-2782
  • 文件大小1043.71KB
  • 发表时间2011-06
  • DOI10.1179/147842209X12579401586807
  • 页码554-561
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