Laser treatment of silicon at nitrogen ambient: thermal stress analysis
Yilbas, B S; Arif, A F M; Karatas, C
- 期刊名称Surface Engineering
- 作者Yilbas, B S; Arif, A F M; Karatas, C
- 卷第27卷
- 期第6期
- 印刷ISSN0267-0844
- 电子ISSN1743-2944
- 文件大小855.89KB
- 发表时间2011-07
- DOI10.1179/174329409X409495
- 页码436-444