AIP Conference Proceedings [AIP ION IMPLANTATION TECHNOLOGY 2101: 18th International Conference on Ion Implantation Technology IIT 2010 - Kyoto, (Japan) (6–11 June 2010)] - Improvements in B[sup +] and BF[sub 2]+] Beam Currents Through the Use of Diboron Tetrafluoride (B[sub 2]F[sub 4]) Gas
Tang, Ying; Campbell, Bryce; Davidson, P.; Santiesteban, R. S.; Sweeney, J.; Kaim, R.; Byl, O.; Yedave, S.; Jones, E.; Chambers, B.; McManus, J.; Matsuo, Jiro; Kase, Masataka; Aoki, Takaaki; Seki, Toshio
- 作者Tang, Ying; Campbell, Bryce; Davidson, P.; Santiesteban, R. S.; Sweeney, J.; Kaim, R.; Byl, O.; Yedave, S.; Jones, E.; Chambers, B.; McManus, J.; Matsuo, Jiro; Kase, Masataka; Aoki, Takaaki; Seki, Toshio
- 印刷ISSN0094-243X
- 文件大小264.44KB
- 发表时间2011
- DOI10.1063/1.3548338
- 页码167-170