Study on Quartz Multitier Mold Fabrication Using Gray Scale Laser Beam Lithography

• 期刊名称Japanese Journal of Applied Physics
• 作者Youn, Sung-Won; Park, Sang-Cheon; Wang, Qing; Suzuki, Kenta; Hiroshima, Hiroshi
• 卷第50卷
• 期第6期
• 印刷ISSN0021-4922
• 电子ISSN1347-4065
• 文件大小106.18KB
• 发表时间2011-6-20
• DOI10.1143/JJAP.50.06GK03