SPIE Proceedings [SPIE SPIE Microtechnologies - Prague, Czech Republic (Monday 18 April 2011)] Smart Sensors, Actuators, and MEMS V - Use of self-sensing piezoresistive Si cantilever sensor for determining carbon nanoparticle mass
- 作者Wasisto, H. S.; Schmid, Ulrich; Sánchez-Rojas, José Luis; Merzsch, S.; Stranz, A.; Leester-Schaedel, Monika; Waag, A.; Uhde, E.; Kirsch, I.; Salthammer, T.; Peiner, E.
- 卷第8066卷
- 印刷ISSN0277-786X
- 文件大小3892.76KB
- 发表时间2011
- DOI10.1117/12.886622
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